Modular substrate gas panel having manifold connections in a common plane

ABSTRACT

A gas panel comprising a first gas stick, a second gas stick, and a first manifold. The first gas stick has a first flow path that includes a first plurality of ports formed in a common plane, and the second gas stick has a second flow path that includes a second plurality of ports formed in the common plane. The first manifold has first and second ports formed in the common plane, the first port being fluidly connected to one port of the first plurality of ports of the first gas stick, and the second port being fluidly connected to one port of the second plurality of ports of the second gas stick. A thermally and vibrationally insulating mounting assembly may be used to mount the first and second gas sticks to a mounting plate.

[0001] This application claims priority to U.S. Provisional ApplicationSerial No. 60/406,132, filed Aug. 27, 2002, entitled MODULAR SUBSTRATEGAS PANEL HAVING MANIFOLD CONNECTIONS IN A COMMON PLANE, which is hereinincorporated by reference in its entirety.

BACKGROUND OF THE INVENTION

[0002] 1. Field of the Invention

[0003] The present invention is directed fluid distribution systems, andmore particularly to a fluid distribution system in which connectionsbetween components and fluid flow paths are formed in a common plane.

[0004] 2. Description of the Related Art

[0005] Fluid distribution systems are used in a variety of applications,including the manufacture of semiconductor devices, the manufacture ofpharmaceutical compounds, etc. In many of these applications, the sizeof the fluid distribution system can dramatically affect costs. Forexample, in the manufacture of semiconductor devices, it is typical forthe fluid distribution system or certain portions thereof to be housedin an ultra clean environment, such as a clean room. Further, becausemany of the fluids used in the manufacture of semiconductors are toxic,highly reactive, or both, such fluid distribution systems frequentlyrequire specialized containment and venting equipment. For such systems,any decrease in the size of the fluid distribution system isadvantageous.

SUMMARY OF THE INVENTION

[0006] According to one embodiment of the present invention, a systemfor enabling a distribution of fluids is provided. The system comprisesa substrate having a substrate body that includes a first substrate portand a second substrate port formed in a first surface and a first fluidpassageway that extends in a first direction and fluidly connects thefirst substrate port to the second substrate port, and a manifold. Themanifold has a manifold body that includes a first manifold port formedin a first surface, a second manifold port formed in a second surfacethat is transverse to the first surface, and a fluid passageway thatfluidly connects the first manifold port to the second manifold port.The substrate further includes a channel formed in the first surface ofthe substrate body that extends in a second direction, the channel beingadapted to position the manifold so that the first surface of thesubstrate body and the first surface of the manifold body are aligned ina common plane.

[0007] According to another embodiment of the present invention, asubstrate is provided that comprises a substrate body, a first port anda second port formed in a first surface of the substrate body, a firstfluid passageway formed in the substrate body and extending in a firstdirection that fluidly connects the first port to the second port, and achannel. The channel is formed in the first surface of the substratebody and extends in a second direction that is different than the firstdirection. The channel is adapted to position a manifold having amanifold body that includes a first port formed in a first surface ofthe manifold body, a second port formed in a second surface of themanifold body, and a fluid passageway that fluidly connects to the firstport of the manifold to the second port of the manifold so that thefirst surface of the substrate body and the first surface of themanifold body are aligned in a common plane.

[0008] According to a further embodiment of the present invention as gaspanel is provided that comprises a first gas stick, a second gas stickand a first manifold. The first gas stick has a first flow path thatincludes a first plurality of ports formed in a common plane, and thesecond gas stick has a second flow path that includes a second pluralityof ports formed in the common plane. The first manifold has first andsecond ports formed in the common plane, the first port being fluidlyconnected to one port of the first plurality of ports of the first gasstick, and the second port being fluidly connected to one port of thesecond plurality of ports of the second gas stick.

[0009] According to another embodiment of the present invention, amanifold is provided. The manifold is adapted to be received in asubstrate having a substrate body that includes first and secondsubstrate ports formed in a first surface of the substrate body, a firstsubstrate fluid passageway extending in a first direction that fluidlyconnects the first and second substrate ports, and a channel formed inthe first surface of the substrate body that extends in a seconddirection. The manifold comprises a manifold body, at least one firstmanifold port formed in a first surface of the manifold body, a secondmanifold port formed in a second surface of the manifold body that istransverse to the first surface of the manifold body, and a manifoldfluid passageway formed in the manifold body and extending in the seconddirection that fluidly connects the at least one first manifold port tothe second manifold port. The manifold body is dimensioned to bepositioned within the channel so that the first surface of the substratebody and the first surface of the manifold body are aligned in a commonplane.

[0010] According to another aspect of the present invention, a mountingassembly is provided. According to one embodiment, the mounting assemblycomprises first and second members and a first fastener. The firstmember has a body including a first surface facing a first direction anda second surface facing a second direction opposite to the firstdirection on opposing surfaces of the body of the first member. Thesecond surface has an outer portion that includes a groove disposedadjacent a perimeter of the outer portion and a central portion thatextends from the outer portion in the second direction. The secondmember has a body including a first surface facing the first directionand a second surface facing the second direction opposite to the firstdirection on opposing surfaces of the body of the second member. Thesecond surface has a central portion and an outer portion that extendsfrom the central portion and includes a groove disposed adjacent aperimeter of the outer portion. The body of the second member furtherincludes a through hole that extends through the body from the firstsurface though the central portion of the second surface. The firstfastener has a threaded shank that is dimensioned to be received withinthe through hole in the body of the second member and engage the centralportion of the second surface of the body first member.

[0011] According to another embodiment, a mounting assembly for mountinga fluid distribution substrate to a plate having a first surface and asecond surface parallel to the first surface is provided. The mountingassembly comprises first and second mounting members and first andsecond fasteners. The first mounting member is disposed adjacent thefirst surface of the plate and has an internally threaded through hole.The first fastener has an externally threaded shank to engage theinternally threaded through hole in the first mounting member andrigidly attach the substrate to the first mounting member. The secondmounting member is disposed adjacent the second surface of the plate andalso has a through hole. The second fastener has an externally threadedshank to engage the internally threaded through hole in the firstmounting member and rigidly attach the second mounting member to thefirst mounting member. The mounting assembly further comprises means forthermally and vibrationally isolating the substrate from the plate.

[0012] According to another aspect of the present invention, a method ofattaching a substrate to a mounting plate having a hole that extendsthrough the mounting plate from a first surface of the mounting plate toa second surface of the mounting plate is provided. The method comprisesacts of positioning an upper mount subassembly on the first surfaceadjacent the hole and passing a central portion of the upper subassemblythrough the hole, positioning a lower mount subassembly on the secondsurface adjacent the hole so that the central portion of the upper mountsubassembly is disposed within a central portion of the lower mountsubassembly, fastening the lower mount subassembly to the upper mountsubassembly, and fastening the substrate to the upper mount subassembly.

BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The accompanying drawings are not intended to be drawn to scale.In the drawings, each identical or nearly identical component that isillustrated in various figures is represented by a like numeral. Forpurposes of clarity, not every component may be labeled in everydrawing. In the drawings:

[0014]FIG. 1 is a plan view of a fluid distribution panel according toone embodiment of the present invention;

[0015]FIG. 2 is a side view of the fluid distribution panel of FIG. 1;

[0016]FIG. 3 is a cross-sectional view of a portion of the fluiddistribution panel taken along line 3-3 in FIG. 2;

[0017]FIG. 4 is a side view of the fluid distribution panel of FIG. 1rotated by 90° counterclockwise;

[0018]FIG. 5 is a perspective view of the fluid distribution panel ofFIG. 1 rotated clockwise by approximately 45°;

[0019]FIG. 6 is a perspective view of the fluid distribution panel ofFIG. 1 rotated clockwise by approximately 135°;

[0020]FIG. 7 is an expanded perspective view of a portion of the fluiddistribution panel identified in FIG. 5;

[0021]FIG. 8 is an expanded perspective view of a portion of the fluiddistribution panel identified in FIG. 6;

[0022]FIG. 9 is a perspective view of a number of different manifoldsand substrates that may be used to form the fluid distribution panel ofFIG. 1;

[0023]FIG. 10 is an expanded perspective view of a two componentposition substrate in accordance with one aspect of the presentinvention;

[0024]FIG. 11 is a cross-sectional view of the two component positionsubstrate of FIG. 10;

[0025]FIG. 12 is an expanded perspective view of a one componentposition substrate in accordance with another aspect of the presentinvention;

[0026]FIG. 13 is a cross-sectional view of the one component substrateshown in FIG. 12;

[0027]FIG. 14 is a plan view of a fluid distribution panel according toanother embodiment of the present invention;

[0028]FIG. 15 is a side view of the fluid distribution panel of FIG. 14;

[0029]FIG. 16 is a side view of the fluid distribution panel of FIG. 14rotated by 90° counterclockwise;

[0030]FIG. 17 is a perspective view of the fluid distribution panel ofFIG. 14 rotated counter clockwise by approximately 135°;

[0031]FIG. 18 is an expanded perspective view of a portion of the fluiddistribution panel identified in FIG. 17;

[0032]FIG. 19 is a perspective view of the fluid distribution panel ofFIG. 14 rotated counter clockwise by approximately 45°;

[0033]FIG. 20 is an expanded perspective view of a portion of the fluiddistribution panel identified in FIG. 19;

[0034]FIG. 21 is an expanded perspective view of a number of differentmanifolds that may be used to form the fluid distribution panel of FIG.14;

[0035]FIG. 22 is an expanded perspective view of a number of additionalmanifolds and a one component position substrate that may be used toform the fluid distribution panel of FIG. 14;

[0036]FIG. 23 is an expanded perspective view of a variety of substratesin accordance with one aspect of the present invention;

[0037]FIG. 24 is an expanded perspective view of a variety of multiplecomponent substrates and substrate inserts that may be used to form thefluid the fluid distribution panel of FIG. 14;

[0038]FIG. 25 is a cross-sectional side view of a portion of the fluiddistribution panel of FIG. 14 taken along line 25-25 in FIG. 15;

[0039]FIG. 26 is an expanded view of a floating mount assembly that maybe used to mount various components of a fluid distribution panel to amounting plate according to another aspect of the present invention;

[0040]FIG. 27 is a view of the floating mount assembly of FIG. 26 from avariety of different perspectives; and

[0041]FIG. 28 is a plan view of a hole in a mounting plate that may beused to receive the floating mount assembly of FIG. 26.

DETAILED DESCRIPTION

[0042] This invention is not limited in its application to the detailsof construction and the arrangement of components set forth in thefollowing description or illustrated in the drawings. The invention iscapable of other embodiments and of being practiced or of being carriedout in various ways. Also, the phraseology and terminology used hereinis for the purpose of description and should not be regarded aslimiting. The use of “including,” “comprising,” or “having,”“containing,” “involving,” and variations thereof herein, is meant toencompass the items listed thereafter and equivalents thereof as well asadditional items.

[0043]FIG. 1 illustrates a plan view of a fluid distribution panelaccording to one embodiment of the present invention. The fluiddistribution panel illustrated in FIG. 1 may be used to selectivelyprovide one or a plurality of different process fluids to a commonmanifold. For example, the fluid distribution panel may be used toselectively provide one or a plurality of different process fluids to acommon manifold, which may itself be fluidly coupled to other portionsof a fluid system, or to a fluid processing tool.

[0044] Although the present invention is described herein primarily withrespect to the distribution of gaseous fluids for semiconductorprocessing applications, it should be appreciated that the presentinvention is not so limited, and may also be used with other processfluids, such as liquids or slurries, or with a combination of gasses,liquids, or slurries. Moreover, the present invention is not limited tosemiconductor processing applications, as it may also be used inchemical applications, pharmaceutical applications, etc. Accordingly,although the present invention is described hereafter with reference toa system that provides a distribution of process gases for use insemiconductor processing applications, it should be appreciated that thepresent invention is not so limited.

[0045] In broad overview, the fluid distribution panel 100 illustratedin FIG. 1 includes a plurality of gas sticks A-L each adapted to receivea process gas from a process gas supply (not shown) and to provideeither the process gas or another gas, such as a purge gas, to anotherportion of the gas system or to a process tool. Each of the gas sticksA-L provides a flow path that extends in a first direction (from bottomto top in FIG. 1) and includes a plurality of ports that are formed in acommon plane. Various fluid processing devices, such as valves,purifiers, filters, pressure transducers, pressure regulators, moisturescrubbers, mass flow controllers, etc. (not shown) are sealinglyfastened to adjacent ports in each respective gas stick and pass theprocess gas or the other gas along the flow path. A first commonmanifold 110 that includes a plurality of ports is positioned in theflow path of each of the gas sticks to permit either the process gas oranother gas, such as a purge gas to be provided by each of the gassticks to a second common manifold 120. The second common manifold alsoincludes a plurality of ports, and is positioned at the end of the flowpath of each of the gas sticks to provide one or more of the processgases or the other gas to a process tool or to a further portion of thegas system. Because the ports in each of the common manifolds arealigned within the common plane of the ports in the flow path, a gaspanel having a reduced height may be obtained. This is advantageous asspace is at a premium in clean-room environments where such gas panelsare frequently used. Further, the number of seals necessary to fluidlycouple each of the flow paths to the common manifolds is reduced fromthat of a gas panel in which the substrates and the manifolds are spacedat different heights. Additionally, where a substrate is used to fluidlycouple two ports of one or more substrates to a port of a manifold, thenumber of fasteners that is necessary to achieve a leak-tight seal canbe reduced to four fasteners, as opposed to six or more fasteners in aconventional design. These and other aspects of the present inventionare now described in detailed with respect to the accompanying drawings.

[0046] As shown in FIG. 1, the gas panel 100 includes a plurality of gassticks A-L, each of which are mounted to a common base 10. Although nospecific mounting configuration is illustrated in the drawings, the gassticks may be mounted to the common base 10 by any of a number of wellknown methods from above the base, or from below the base. Each of thegas sticks A-L includes a one component position substrate 60 and a twocomponent position substrate 70 that are fastened to the common base 10,typically with the use of a threaded fastener, such as an Allen bolt.Each of the substrates 60, 70 is typically formed from a block ofstainless steel such as 316 stainless steel, hastalloy, or othermaterials suitable for use with the intended fluids. Each of thesubstrates 60, 70 has a channel 69, 79 (seen most clearly in FIGS. 9,10, 11, 12, and 13) that is formed therein to receive a portion of amanifold 20, 25, 30, 35, and 40 (seen most clearly in FIG. 9). Each ofthe manifold portions 20, 25, 30, 35, and 40 is also typically formedfrom an elongated block of stainless steel or other suitable material,and connected together to form a common manifold 110, 120. For example,where the manifold portions 20, 25, 30, 35, and 40 are formed fromstainless steel, the manifold portions may be butt welded together in aconventional manner to form the common manifolds 110, 120. In theembodiment illustrated in FIG. 1, the two component substrate 70 of eachof the gas sticks A-L receives a manifold portion (e.g., manifoldportion 35 in gas stick A) that is used to selectively provide a purgegas (provided via conduit 85) to the flow path of the respective gasstick. Each of the one component substrates 60 also receives a manifoldportion (e.g., manifold portion 20 in gas stick A) that is used toprovide a common outlet that is common to each of the gas sticks A-L andwhich may be connected to a process tool or to another portion 90 of thegas processing system, as shown in FIG. 1. In the illustratedembodiment, the portion 90 of the gas processing system is formed by aplurality of interconnecting male and female substrates that aredescribed in U.S. Pat. No. 6,394,138 B1, which is herein incorporated byreference in its entirety.

[0047] In use, each gas stick A-L is connected to a process gas supplyby a flange 50 that is fastened to the base 10 by a pair of fasteners(not shown). A complementary flange (not shown) is typically connectedto the flange 50 and to a conduit that provides the process gas from theprocess gas supply. As seen most clearly in FIG. 8, the flange 50includes a top port 51 for connection to the process gas supply (via thecomplementary flange) and a side port 52 that is connected to the topport 51 of the flange 50 and to an inlet port 71 of the substrate 70.The process gas flows through an internal fluid passageway (see FIG. 11,for example) in the substrate 70 to an outlet port 72 formed in the topsurface of the substrate 70 (FIGS. 10, 11). A two-port valve or otherfluid processing component (not shown) is positioned above the outletport 72 and an inlet port 73 that is also formed in the top surface ofthe substrate 70, and forms a seal with the substrate 70. A metallicgasket or other type of sealing member (not shown) is typically used toprovide a leak tight seal around the ports 72, 73 as well as the otherports in the top surface of the substrate 70. For example, in theembodiment depicted in FIG. 1, each of the ports formed in the topsurface of the substrate (as well as the ports formed in the manifoldportions) includes a counter-bore (not numbered, but shown in FIGS. 9,10, 11, 12, and 13) that is adapted to receive a annular C-shaped seal.Alternatively, other types of annular seals, such as those described inU.S. Pat. No. 5,803,507, and U.S. Pat. No. 6,142,539, which are hereinincorporated by reference in their entirety, may be used withappropriately configured ports in the substrate and the manifoldportions. In the described embodiment, the two-port valve selectivelyallows the process gas to flow further along the gas stick.

[0048] From inlet port 73, the process gas then flows through a V-shapedchannel formed in the body of the substrate 70 (shown in FIG. 11) to anoutlet port 74 that is also formed in the top surface of the substrate70. The substrate 70 includes a channel 79 that is used to receive aportion of the common manifold 110. In the illustrated embodiment ofFIG. 1, for example, the substrate 70 of gas stick A receives a twoposition manifold portion 35 having two ports 37, 39 (FIG. 9) formed ina top surface of the manifold portion 35 and another port 36 formed in asurface of the manifold portion 35 that is transverse to the topsurface. The port 36 formed in the transverse surface of the manifoldportion 35 is fluidly connected to another manifold portion (e.g.,manifold portion 40 in FIGS. 1 and 9), which together form a portion ofthe common manifold 110. The channel 79 in the substrate 70 is adaptedto position the manifold portion 35 so that one of the ports 37, 39formed in the top surface of the manifold portion 35 is aligned in thecommon plane of the top surface of the substrate 70 with the outlet port74 and also with an inlet port 76 on the other side of the channel 79 ofthe substrate 70. As described in further detail below, the channel andthe manifold portions may each include means for aligning the ports 74,76 that are formed in the top surface of the substrate 70 with one ofthe ports (e.g., 37, 39) in the top surface of the manifold portion 35.

[0049] In the illustrated embodiment, a three-port valve (notillustrated) is positioned above ports 74 and 76 in the substrate 70 andone of the ports 37, 39 in the top surface of the manifold portion 35and fastened to the substrate 70 by a plurality of fasteners (notshown). The plurality of fasteners are received in bores in the topsurface of the substrate 70, that includes at least one bore, andpreferably two bores, on each side of the channel 79 in the substrate70. Advantageously, only four fasteners (two on each side of the channel79) are needed to form a leak-tight seal with the valve, whereas inconventional designs, traditionally two fasteners are required for eachport, for a total of six fasteners required to achieve a leak-tight sealwith three ports. The fasteners received on each side of the channel 79,together with a gasket (not shown) or other sealing member form a leakfree seal among the ports 74, 76 in the substrate and the port 37 or 39in the top surface of the manifold portion 35. The three-port valvepermits one of either the process gas or another gas, such as a purgegas, that is conducted by the common manifold 110 to be provided by aV-shaped channel connecting the inlet port 76 in the substrate 70 to anoutlet port 78 of the substrate 70 (see FIG. 11). In the illustratedembodiment, the inlet port of a mass flow controller (not shown) isfluidly connected to the outlet port 78 in the substrate 70 andprovides, by way of an outlet port of the mass flow controller, eitherthe process gas or the other gas to an inlet port 61 of the onecomponent position substrate 60. The mass flow controller bridges thesubstrate 70 and the substrate 60.

[0050] As best illustrated in FIGS. 12 and 13, the one componentposition substrate 60 includes an inlet port 61 and an outlet port 62formed in the top surface of the substrate 60 that are connected by aV-shaped passageway. At least one bore, and preferably two bores, areformed in the top surface of the substrate 60 to sealingly fasten theoutlet port of the mass flow controller to the inlet port 61 of thesubstrate 60.

[0051] The substrate 60 also includes a channel 69 that is used toreceive a portion of the common manifold 120. In the illustratedembodiment of FIG. 1, for example, the substrate 60 of gas stick Areceives a one position manifold portion 20 having a port 22 (FIG. 9)formed in a top surface of the manifold portion 20 and a pair of ports21, 23 formed in opposing surfaces of the manifold portion 20 that aretransverse to the top surface. One of the ports 21, 23 formed in thetransverse surfaces of the manifold portion 20 is fluidly connected toanother manifold portion (e.g., manifold portion 40 in FIG. 1) that isfluidly connected, by way of other manifold portions, to the outletports 62 of the other gas sticks B-L, and the other of the ports 21, 23is fluidly connected to a conduit 80 that is fluidly connected to eithera process tool, or another portion 90 of the gas system.

[0052] The channel 69 in the substrate 60 is adapted to position themanifold portion 20 so that the port 22 formed in the top surface isaligned in the common plane of the top surface of the substrate 60 withthe outlet port 62 of the substrate 60. As described in further detailbelow, the channel 69 and the manifold portion 20 may each include meansfor aligning the outlet port 62 that is formed in the top surface of thesubstrate 60 with the port 22 formed in the top surface of the manifoldportion 20.

[0053] In the illustrated embodiment, a two-port valve (not illustrated)is positioned above port 62 in the substrate 60 and the port 22 in thetop surface of the manifold portion 20 and fastened to the substrate 60by a plurality of fasteners (not shown). The plurality of fasteners arereceived in bores in the top surface of the substrate 60, that includesat least one bore, and preferably two bores, on each side of the channel69 in the substrate 60. The fasteners received on each side of thechannel 69, together with a gasket (not shown) or other sealing memberform a leak free seal among the port 62 in the substrate 60 and the port22 in the top surface of the manifold portion 20. The two-port valvepermits one of either the process gas or another gas, such as a purgegas, to be provided to the common manifold 120, and from the commonmanifold to another portion 90 of the system.

[0054]FIG. 9 illustrates a number of manifold portions 20, 25, 30, 35,and 40 that may be used to form a gas panel according to an embodimentof the present invention. The manifold portions 20, 25, 30, 35, and 40are similar in that each includes a manifold body that is formed from anelongated block and each includes at least one port formed in a topsurface of the manifold body and at least one port formed in a surfaceof the manifold body that is transverse to the top surface of themanifold body. Further, each of the manifold portions includes means foraligning the port or ports formed in the top surface of the manifoldbody with one or more ports formed in the top surface of the substrates60, 70. In the illustrated embodiment, each of the manifold portionsincludes a pair of grooves formed in a transverse surface of themanifold body that are spaced apart on the transverse surface on eitherside of the port and used to align the port on the top surface of themanifold body with the port or ports in the substrate. It should beappreciated that only a single groove can alternatively be used, as wellas other alignment means, such as those illustrated in published U.S.application number US2002/0000256A1, which is herein incorporated byreference in its entirety, as known to those skilled in the art.

[0055] As shown in FIG. 9, manifold portion 20 includes a single port 22formed in the top surface of the manifold body and a pair of ports 21,23 formed in opposing surfaces of the manifold body that are transverseto the top surface of the manifold body. An internal fluid passagewayformed along the longitudinal axis of the manifold body connects the topsurface port 22 with each of the ports 21, 23 formed in the transversesurfaces.

[0056] Manifold portion 25 is similar to manifold portion 20 however,manifold portion 25 includes only a single port 26 formed in thetransverse surface of the manifold body. Manifold portion 25 istypically used to terminate the common fluid manifold 110, 120 formed bythe interconnection of adjacent manifold portions.

[0057] Manifold portion 30 is similar to manifold portion 20 in that itincludes a pair of ports 31, 33 formed in opposing transverse surfacesof the manifold body. However, manifold portion 30 includes two ports32, 34 formed in a top surface of the manifold body. Each of the ports31, 32, 33, and 34 communicates with an internal fluid passageway formedin the manifold body along the longitudinal axis of the manifold body.Each of the ports 32, 34 formed in the top surface of the manifold aresurrounded by a plurality of alignment grooves formed in each side ofthe manifold body. The manifold portion 30 may be used to fluidlyconnect a portion of the flow paths of a first gas stick and a secondgas stick to another manifold portion, and thus the common manifold 110,120.

[0058] Another manifold portion 35 includes a pair of ports 37, 39formed in a top surface of the manifold body and a single port 36 formedin a transverse surface of the manifold body. The manifold portion 35 issimilar to manifold 25 in that it may be used to terminate the commonmanifold 110, 120. However, the manifold portion 35 is used to connect aportion of the fluid flow paths of two gas sticks to a common manifold110, 120, such as, for example, illustrated in FIG. 1.

[0059] The manifold portions also include a three-position manifoldportion 40 that includes three ports 41, 42, 43 formed in a top surfaceof the manifold body and a pair of ports 47, 49 formed in opposingsurfaces of the manifold body that are transverse to the top surface.Each of the side surfaces of the manifold portion 40 includes aplurality of pairs of grooves formed on each side surface of themanifold body and positioned adjacent to each of the ports 41, 42, and43 that may be used to align the ports of the manifold portion 40 withthe ports of a respective substrate.

[0060] It should be appreciated that although a number of differentmanifold portions 20, 25, 30, 25, and 40 have been described herein, thepresent invention is not limited to the illustrated embodiments. Forexample, manifold portions having four or more ports formed on a topsurface of the manifold body may be used, with only a single port in atransverse surface of the manifold body, or with two ports formed inopposing transverse surfaces of the manifold body. It should further beappreciated that although the ports formed in the top surface of themanifold portions are illustrated as including a counter-bore that isadapted to receive an annular C-type seal, different port configurationsmay alternatively be used, such that standard fluid processingcomponents may be used therewith. Moreover, it is not required that allports formed in the top surface of the manifold have the same type ofseal configuration, as one type of seal may be used in one port, whileanother type of seal may be used in another port.

[0061] As shown in FIGS. 9, 10, 11, 12, and 13, alignment grooves mayalso be formed in a side surface of each of the channels in thesubstrates 60 and 70 that may be used to align a manifold portion withinthe channel 69, 79 of the substrate. In use, a manifold portion isinserted into the channel 69, 79 so that the alignment grooves in thechannel 60, 70 and in the manifold portion are approximately aligned,and then an aligment pin 67, 77 is inserted into each pair of alignmentgrooves from above to precisely align the manifold within the channel69, 79. The alignment pins 67, 77 may be made from any suitablematerial, but are preferably formed from a material that is inert to theprocess fluid being used, such that if any leakage should occur thealignment of the manifold portion within the channel is not disturbed.

[0062] Each of the alignment pins 67, 77 has a length such that when thealignment pin is inserted into the grooves in the substrate and themanifold portion, the top surface of the alignment pin is no higher thanthe top surface of the substrate and the manifold portion to avoidinterfering with the seal between the ports of the substrate and themanifold and the fluid component fastened thereabove. Although not shownin the drawings, the grooves in the sides of the channel may extend intoa base of the channel 69, 79 such that the alignment pins may be longerin length than the depth of the channel, yet still remain below the topsurface of the substrate when fully inserted.

[0063] As illustrated in FIGS. 11 and 13, each of the substrates 60, 70may include an aperture 65, 75 formed in the base of the channel thatmay be used to remove a manifold portion after it has been inserted intothe channel. For example, a rigid member, such as a screwdriver may beinserted from below the substrate and used to eject the manifold portionfrom the channel. Alternatively, the aperture 65, 75 in the base of thechannel may be threaded such that a threaded member may be incrementallyinserted into the aperture 65, 75 to remove a manifold portion.

[0064] As also shown in each of FIGS. 10, 11, and 12, at least one ofthe ports in the top surface of the substrates 60, 70 may include a leakport 95 that is formed in the top surface of the substrate. Typically, aleak port 95 is provided between each pair of ports to which a fluidcomponent is to be fluidly connected.

[0065] In the embodiments described herein, each of the common manifolds110, 120 are fluidly connected to another portion 90 of the gasprocessing system. It should be appreciated that the present inventionis not limited to this illustrated configuration. For example, thecommon manifold 110 may instead be fluidly connected by a flange 50directly to another gas supply. Moreover, although each of thesubstrates 60, 70 is depicted as having a single channel 69, 79 formedtherein, multiple channels may alternatively be provided, such thatvarious fluids may be introduced to each of the gas sticks A-L, oralternatively to one or more of the gas sticks. Moreover, it should beappreciated that although a specific configuration using a two portvalve, a three port valve, and a mass flow controller in each of the gassticks A-L has been described, the present invention is not so limited.Thus, in accordance with the teachings of the present invention, morethan two component stations may be provided on a single substrate. Forexample, the substrate 70 may include one or more additional componentstations adapted to receive a filter, a pressure transducer or apressure regulator, or a variety of other fluid processing componentsthat are conventionally provided. Moreover, it is not required that thefluid components mounted to each of the substrates be the same in eachgas stick, as a myriad of different combinations of components may bereadily envisioned.

[0066] In addition, although the present invention has been describedprimarily in terms of fluid processing components that utilize acounter-bore type seal, it should be appreciated that other types offluid processing components, such as face mounted components, cartridgemounted components, etc. may be used, such that the gas panel canaccommodate a wide range of commercially available and/or standardcomponents. Further, although no specific configuration for mounting thesubstrates 60, 70 to the base 10 has been shown, it should beappreciated that any number of mounting methods may be used.

[0067]FIGS. 14 through 28 illustrate a fluid distribution panelaccording to another embodiment of the present invention. As with theembodiment described above with respect to FIGS. 1-13, the embodiment ofFIGS. 14 through 28 permits ports formed in a top surface of a substrateto be aligned in a common plane with ports formed in a top surface of acommon manifold or portions of a common manifold. For this purpose, manyof the substrates include a channel that is formed in a top surface ofthe substrate in which manifold portions may be received. However,rather than using alignment pins (e.g., alignment pins 67 and 77 inFIGS. 9-13) that fit in grooves formed in the sides of the channel andthe manifold portions, the embodiment of FIGS. 14 through 28 usesdifferent means for aligning the ports in the substrates and themanifold portions. For example, as illustrated in FIG. 22, complementaryalignment posts 281 and alignment holes 282 may be provided at the baseof the channel and the base of the manifold portion to align ports inthe top surface of the manifold portion with one or more ports in thetop surface of a substrate. The alignment posts may be formed in thebase of the channel, with the alignment holes being formed in the baseof the manifold portion as shown, or alternatively, the alignment postsmay be formed in the base of the manifold portion with the alignmentholes being formed in the base of the channel.

[0068] Another difference between the embodiments of FIGS. 1-13 and theembodiment of FIGS. 14-28 is that rather than using the mounting of agas processing component, such as a valve or filter, to fix thealignment of the ports in a common plane, the embodiment of FIGS. 14-28uses mechanical fasteners to fix the top surfaces of the manifoldportions and the substrates within a common plane. As described infurther detail below, by rigidly mounting the manifold portions withinthe channel of a substrate, the fluid path created is renderedsubstantially more immune to leaks caused by shock or vibration.

[0069] A further difference between the embodiments of FIGS. 1-13 andthe embodiment of FIGS. 14-28 is that in the embodiment of FIGS. 14-28,each of the component substrates (as well as other components) areresiliently mounted to a mounting plate that may be rigidly attached toa base of the panel. In particular, a floating mount is used to attachvarious components to a mounting plate, which permits limited movementin three orthogonal directions, provides significant pull and shearstrength, thermally decouples components from the mounting plate andbase (thereby permitting the components to be effectively heated orcooled without first heating or cooling the thermal mass of the base),and provides vibration damping. These and other aspects of theembodiment of FIGS. 14-28 are now described in detail below.

[0070] Fluid distribution panel 200 illustrated in FIG. 14 includes aplurality of gas sticks A-L each adapted to receive a process gas from aprocess gas supply (not shown) and to provide either the process gasand/or another gas, such as a purge gas, to another portion of the gassystem or to a process tool. Each of the gas sticks A-L provides a flowpath that extends in a first direction (from top to bottom in FIG. 14)and includes a plurality of ports that are formed in a common plane.Various fluid processing devices, such as valves, purifiers, filters,pressure transducers, pressure regulators, moisture scrubbers, mass flowcontrollers, etc. (not shown) are sealingly fastened to adjacent portsin each respective gas stick and pass the process gas or the other gasalong the flow path. A first common manifold 2110 that includes aplurality of ports is positioned in the flow path of a plurality of thegas sticks (i.e., gas sticks A-F) to permit either the process gas oranother gas, such as a purge gas to be provided by each of the gassticks to a second common manifold 2120. The second common manifold 2120also includes a plurality of ports, and is positioned at the end of theflow path of each of the gas sticks A-E to provide one or more of theprocess gases or the other gas to a process tool or to a further portionof the gas system (e.g., mixing substrate 410). A third common manifold2130 that includes a plurality of ports is positioned to receive processgases from one or more of the gas sticks H-L and provide those processgases or combination of process gases to a process tool or furtherportion of the gas system (e.g., mixing substrate 410). As with thefluid distribution panel described above with respect to FIG. 1, becausethe ports in each of the common manifolds are aligned within the commonplane of the ports in the flow path, a gas panel having a reduced heightmay be obtained.

[0071] As shown in FIG. 14, the gas panel 200 includes a plurality ofgas sticks A-L. In contrast to the fluid distribution panel described inFIG. 1, rather than each of the gas sticks being directly and rigidlymounted to a common base (e.g., base 10 in FIG. 1), each of the gassticks A-L in FIG. 14 is resiliently mounted to a mounting plate 210using floating mounts (described in further detail below with respect toFIGS. 26 and 27), which, in turn, is mounted to a base (not shown) orother rigid structure. In the described embodiment of FIG. 14, themounting plate 210 may be formed from a piece of sheet metal that isbent in the manner illustrated in FIGS. 15 and 16. As will be describedin more detail further below, the mounting plate 210 has considerablyless thermal mass than the base 10 of FIG. 1, such that one or more ofthe gas sticks A-L may be heated or cooled in an effective manner, byuse of a heating or cooling stick inserted in holes 500 (see FIG. 15,for example) that extend through the substrates forming the gas stick.To further thermally isolate the gas sticks, the mounting plate 210 mayalternatively be made from a rigid material that is thermallyinsulating, rather than thermally conductive, such as plastic.

[0072] Each of the gas sticks A-E includes a one component positionsubstrate 260 and a two component position substrate 270 that areresiliently fastened to the mounting plate 210, typically with the useof a threaded fastener, such as an Allen bolt. Each of the substrates260, 270 is typically formed from a block of stainless steel such as 316stainless steel, hastalloy, or other materials suitable for use with theintended fluids. Each of the substrates 260, 270 has a channel 269, 279(seen most clearly in FIGS. 22 and 23) that is formed therein to receivea portion of a manifold 220, 225, 230, 235, 240, 255, and 265 (seen mostclearly in FIGS. 21 and 22). Each of the manifold portions 220, 225,230, 235, 240, 255, and 265 is also typically formed from an elongatedblock of stainless steel or other suitable material, and connectedtogether to form a common manifold 2110, 2120, and 2130. For example,where the manifold portions are formed from stainless steel, themanifold portions may be butt welded together in a conventional mannerto form the common manifolds 2110, 2120, and 2130.

[0073] In the embodiment illustrated in FIG. 14, the two componentposition substrate 270 of each of the gas sticks A-F receives a manifoldportion (e.g., manifold portion 220 in gas stick A) that is used toselectively provide a purge gas (provided via conduit 285 and substrateinsert 435A from purge gas inlet 201) to the flow path of the respectivegas stick. Each of the one component position substrates 260 alsoreceives a manifold portion (e.g., manifold portion 235 in gas stick A)that is used to provide a common outlet that is common to each of thegas sticks A-E and may be connected to a process tool or to anotherportion of the gas processing system, as shown in FIG. 14. In theillustrated embodiment, process gas or gases or purge gases are providedto a mixing inlet substrate 410 via a left-handed substrate insert 420that is fluidly connected to the common manifold 2120, and then viaanother insert 435B to a mixing outlet substrate 415, and then to a gasoutlet 202.

[0074] Other process gases may be received via inlets 203 in gas sticksG-L and provided, via one component position substrates 405 (which donot include a channel), to other one component position substrates 260that are fluidly connected to common manifold 2130. The one componentposition substrate 405 illustrated in gas sticks G-L would typically beused to receive an inert, non-toxic, and/or non-reactive process gasthat does not require access to a purge gas. As shown, process gasesfrom one or more of gas sticks G-L are provided, via a right handedsubstrate insert 425 to the mixing inlet substrate 410, and then viaanother insert 435C to mixing outlet substrate 415, and then to the gasoutlet 202.

[0075] In use, each gas stick A-L is connected to a process gas supplyby a gas inlet 203 that, in the illustrated embodiment, has a threadedcoupling. For gas sticks A-F, the process gas flows to an inlet port 271(see FIG. 23, for example) and through an internal fluid passageway inthe substrate 270 to an outlet port 272 formed in the top surface of thesubstrate 270. A two-port valve or other fluid processing component (notshown) is positioned above the outlet port 272 and an inlet port 273that is also formed in the top surface of the substrate 270, and forms aseal with the substrate 270. A metallic gasket or other type of sealingmember (not shown) is typically used to provide a leak tight seal aroundthe ports 272, 273 as well as the other ports in the top surface of thesubstrate 270. As in the embodiment depicted in FIG. 1, each of theports formed in the top surface of the substrate 270 (as well as theports formed in the manifold portions) may include a counter-bore thatis adapted to receive an annular C-shaped seal. Alternatively, othertypes of annular seals, such as those described in U.S. Pat. No.5,803,507, and U.S. Pat. No. 6,142,539 may be used with appropriatelyconfigured ports in the substrate and the manifold portions. In thedescribed embodiment, the two-port valve selectively allows the processgas to flow further along the gas sticks A-F.

[0076] From inlet port 273, the process gas then flows through aV-shaped channel formed in the body of the substrate 270 (shown in FIG.23) to an outlet port 274 that is also formed in the top surface of thesubstrate 270. The substrate 270 includes a channel 279 that is used toreceive a portion of the common manifold 2110. In the illustratedembodiment of FIG. 14, for example, the substrate 270 of gas stick Areceives a one position manifold portion 220 having a single port 222(FIG. 21) formed in a top surface of the manifold portion 220 and a pairof ports 221, 223 formed in opposing surfaces of the manifold portion220 that are transverse to the top surface. The ports 221, 223 formed inthe transverse surfaces of the manifold portion 220 are fluidlyconnected to conduit 285 and another manifold portion (e.g., manifoldportion 240 in FIGS. 14 and 23), which together form a portion of thecommon manifold 2110. The channel 279 in the substrate 270 is adapted toposition the manifold portion 220 so that the port 222 formed in the topsurface is aligned in the common plane of the top surface of thesubstrate 270 with the outlet port 274 and also with an inlet port 276on the other side of the channel 279 of the substrate 270.

[0077] In contrast to the two component position substrate 70 in whichthe mounting of a gas processing component or device, such as valve, orfilter is used to fix the alignment of ports in a common plane, the twocomponent position substrate 270 uses a pair of fasteners 205 disposedon either side of the channel 279 to rigidly mount the manifold portionwithin the channel 279 of the substrate. Each fastener 205 is receivedin a mounting recess 290 formed in a sidewall of the channel asillustrated in FIG. 23. The mounting recess 290 is generally outwardlyarcuate in shape, terminates in an internally threaded hole 291, andincludes a shelf or edge 292. The edge 292 of the mounting recess 290serves as a stop for the bottom edge of the head of the fastener 205(similar in construction to fastener 315 shown in FIG. 26). Eachmanifold portion 220, 225, 230, 240, 255, and 265 includes acomplementary recess 295 (see FIGS. 21 and 22), such that when thefastener 205 is inserted, the bottom edge of the head of the fastener205 forces the manifold tight against the bottom of the channel 279 ofthe substrate 270. In general, each of the mounting recesses 290 spansmore than 180 degrees, and the complementary recess 295 in the manifoldportions spans less than 180 degrees. When aligned, the recesses 290,295 form a substantially complete circle. The top-most portion of thefastener 205 and the depth of the edge 292 are dimensioned so that thetop-most portion of the fastener 205 does not protrude above the topsurface of the substrate 270 and interfere with the seal. In general, apair of fasteners 205 located on opposite side surfaces of the channel279 is sufficient to force the manifold portion tightly within thechannel 279 of the substrate 270.

[0078] In the illustrated embodiment, a three-port valve (notillustrated) is typically positioned above ports 274 and 276 in thesubstrate 270 and the port 222 in the top surface of the manifoldportion 220 and fastened to the substrate 270 by a plurality offasteners (not shown). The plurality of fasteners are received in boresin the top surface of the substrate 270, that includes at least onebore, and preferably two bores, on each side of the channel 279 in thesubstrate 270. The fasteners received on each side of the channel 279,together with a gasket (not shown) or other sealing member, form a leakfree seal among the ports 274, 276 in the substrate and the port 222 inthe top surface of the manifold portion 220. The three-port valvepermits one of either the process gas or another gas, such as a purgegas, that is conducted by the common manifold 2110 to be provided by aV-shaped channel connecting the inlet port 276 in the substrate 270 toan outlet port 278 of the substrate 270 (see FIG. 23). In theillustrated embodiment, the inlet port of a mass flow controller (notshown) is typically fluidly connected to the outlet port 278 in thesubstrate 270 and provides, by way of an outlet port of the mass flowcontroller, either the process gas or the other gas to an inlet port 261of the one component position substrate 260 (FIG. 23). The mass flowcontroller bridges the substrate 270 and the substrate 260 in each ofgas sticks A-E.

[0079] For gas sticks G-L, the process gas received at gas inlet 203flows to an inlet port 406 (see FIG. 23) of a one component positionsubstrate 405 and through an internal fluid passageway in the substrate405 to an outlet port 407 formed in the top surface of the substrate405. A two-port valve or other fluid processing component (not shown) istypically positioned above the outlet port 405 and an inlet port 408that is also formed in the top surface of the substrate 405, and forms aseal with the substrate 405. A metallic gasket or other type of sealingmember (not shown) may be used to provide a leak tight seal around theports 407, 408 as well as the other ports in the top surface of thesubstrate 405. Each of the ports 407, 408, and 409 formed in the topsurface of the substrate 405 may include a counter-bore that is adaptedto receive a annular C-shaped seal, although other types of annularseals may alternatively be used. The two-port valve selectively allowsthe process gas to flow further along the gas sticks G-L. The onecomponent position substrate 405 does not include a channel (e.g.,channel 269), and as noted previously, may be used to receive processgases that do not require purging.

[0080] From inlet port 408 in substrate 405, the process gas then flowsthrough a V-shaped channel formed in the body of the substrate 405 (FIG.23) to an outlet port 409 that is also formed in the top surface of thesubstrate 405. For each of gas sticks H-L, the inlet port of a mass flowcontroller (not shown) is typically fluidly connected to the outlet port409 in the substrate 405 and provides, by way of an outlet port of themass flow controller, the process gas to an inlet port 261 of the onecomponent position substrate 260 (FIG. 23). The mass flow controllerbridges the substrate 405 and the substrate 260 in each of gas sticksG-L.

[0081] As best illustrated in FIGS. 22 and 23, the one componentposition substrate 260 includes an inlet port 261 and an outlet port 262formed in the top surface of the substrate 260 that are connected by aninternal V-shaped passageway. At least one bore, and preferably twobores, are formed in the top surface of the substrate 260 to sealinglyfasten the outlet port of the mass flow controller to the inlet port 261of the substrate 260.

[0082] The substrate 260 includes a channel 269 that is used to receivea portion of the common manifolds 2120 and 2130. In the illustratedembodiment of FIG. 14, for example, the substrate 260 of gas stick Areceives a two position manifold portion 235 having a pair of ports 237,239 (FIG. 21) formed in a top surface of the manifold portion 235 and aport 236 formed in a surface of the manifold portion 235 that istransverse to the top surface. The port 236 formed in the transversesurface of the manifold portion 235 is fluidly connected to anothermanifold portion (e.g., manifold portion 240 in FIG. 14) that is fluidlyconnected, by way of other manifold portions, to the outlet ports 262 ofthe other gas sticks C-E. The channel 269 in the substrate 260 isadapted to position the manifold portion 235 so that one of the ports237, 239 (i.e., port 237) formed in the top surface is aligned in thecommon plane of the top surface of the substrate 260 with the outletport 262 of the substrate 260.

[0083] In contrast the one component position substrate 60 in which themounting of a gas processing component or device, such as valve, orfilter is used to fix the alignment of ports in a common plane, the onecomponent position substrate 260 uses a pair of fasteners 205 disposedon either side of the channel 269 to rigidly mount the manifold portionwithin the channel 269 of the substrate 260. In this regard, the onecomponent position substrate 260 is similar to the two componentposition substrate 270, as each fastener 205 is received in a mountingrecess 290 formed in a sidewall of the channel 269 as illustrated inFIG. 23. The mounting recess 290 terminates in an internally threadedhole 291, and includes a shelf or edge 292 that serves as a stop for thebottom edge of the head of the fastener 205. Each manifold portion 220,225, 230, 240, 255, and 265 includes a complementary recess 295 (seeFIGS. 21 and 22), such that when the fastener 205 is inserted, thebottom edge of the head of the fastener 205 forces the manifold portiontight against the bottom of the channel 269 of the substrate 260. Thetop-most portion of the fastener 205 and the depth of the edge 292 aredimensioned so that the top-most portion of the fastener 205 does notprotrude above the top surface of the substrate 260 and interfere withthe seal. As with the two component position substrate 270, a pair offasteners 205 located on opposite side surfaces of the channel 269 issufficient to force the manifold portion tightly within the channel 269of the substrate 260.

[0084] In the illustrated embodiment, a two-port valve (not illustrated)is positioned above port 262 in the substrate 260 and the port (e.g.,port 239) in the top surface of the manifold portion (e.g. manifoldportion 235) and fastened to the substrate 260 by a plurality offasteners (not shown). The plurality of fasteners are received in boresin the top surface of the substrate 260, that includes at least onebore, and preferably two bores, on each side of the channel 269 in thesubstrate 260. The fasteners received on each side of the channel 269,together with a gasket (not shown) or other sealing member form a leakfree seal among the port 262 in the substrate 260 and the port in thetop surface of the manifold portion. The two-port valve permits one ofeither the process gas or another gas, such as a purge gas, to beprovided to the common manifold 2120, and from the common manifold toanother portion of the system.

[0085] Gas sticks F and G share certain components in common with gassticks A-E and H-L, but illustrate how other components may be used tocreate a fluid distribution system that can accommodate a wide varietyof configurations. For example, gas stick F includes a two componentposition substrate 270, a one component position T-slotted substrate430, and a left-handed substrate insert 420. The two component positionsubstrate 270 receives a process gas at a gas inlet 271 from a processgas supply and provides that process gas, via an internal fluidpassageway, to an outlet port 272 formed in the top surface of thesubstrate 270. A two-port valve or other fluid processing component (notshown) is positioned above the outlet port 272 and an inlet port 273that is also formed in the top surface of the substrate 270, and forms aseal with the substrate 270. From inlet port 273, the process gas thenflows through a V-shaped channel formed in the body of the substrate 270(shown in FIG. 23) to an outlet port 274 that is also formed in the topsurface of the substrate 270. The substrate 270 includes a channel 279that is used to receive a portion of the manifold 2110. In theillustrated embodiment of FIG. 14, for example, the substrate 270 of gasstick F receives a two position manifold portion 235 having a pair ofports 237, 239 (FIG. 21) formed in a top surface and a single port 236formed in a surface of the manifold portion 235 that is transverse tothe top surface. The channel 279 in the substrate 270 is adapted toposition the manifold portion 235 so that the port 237 formed in the topsurface is aligned in the common plane of the top surface of thesubstrate 270 with the outlet port 274 and also with an inlet port 276on the other side of the channel 279 of the substrate 270.

[0086] A three-port valve (not illustrated) is typically positionedabove ports 274 and 276 in the substrate 270 and the port 237 in the topsurface of the manifold portion 235 and fastened to the substrate 270 bya plurality of fasteners (not shown). The fasteners received on eachside of the channel 279, together with a gasket (not shown) or othersealing member form a leak free seal among the ports 274, 276 in thesubstrate and the port 237 in the top surface of the manifold portion235. The three-port valve permits one of either the process gas oranother gas, such as a purge gas, that is conducted by the commonmanifold 2110 to be provided by a V-shaped channel connecting the inletport 276 in the substrate 270 to an outlet port 278 of the substrate 270(see FIG. 23). The inlet port of a mass flow controller (not shown) isfluidly connected to the outlet port 278 in the substrate 270 andprovides, by way of an outlet port of the mass flow controller, eitherthe process gas or the other gas to an inlet port 431 of a one componentposition T-slotted substrate 430 (FIG. 23). The mass flow controllerbridges the substrate 270 and the T-slotted substrate 430 in gas stickF.

[0087] Rather than using a one component position substrate 260 as ineach of gas sticks A-E and H-L, gas stick F uses a one componentposition T-slotted substrate 430 that is adapted to receive either aleft handed or right handed substrate insert 420, 425 (FIG. 24). TheT-slotted substrate 430 includes an inlet port 431 and an outlet port432 formed in a top surface thereof, and a channel 269, similar inconstruction to that of one component position substrate 260. However,the T-slotted substrate 430 also includes an additional channel 283formed in the top surface of the substrate 430 that permits either aleft handed or right handed substrate insert 420, 425 to be receivedtherein.

[0088] Each of the left handed and right handed substrate inserts 420,425 includes a pair of ports (422, 423 and 427, 428) formed in a topsurface thereof that are connected by a V-shaped channel. Each of theleft handed and right handed substrate inserts 420, 425 (FIG. 24) alsoincludes a port 421, 426 formed in a surface of the substrate insertthat is transverse to the top surface. The ports 421, 426 are internallyfluidly connected to the V-shaped channel, and thus to each of ports422, 423 and 427, 428, and may be used to connect to a manifold portion(e.g., manifold portion 240 in FIG. 14) that is fluidly connected tocommon manifold 2120 or 2130. In the embodiment illustrated in FIG. 14,a two port valve (not shown) may be positioned above port 432 insubstrate 430 and above the port 422, 427 of the substrate inserts 420,425 to selectively provide one or more process gases or a purge gas fromone or more of gas sticks A-F and G-L to the port 423, 428 of thesubstrate insert 420, 425, and from there, to the mixing inlet substrate410. Typically, a three-port valve is positioned above ports 423 and 428of the substrate inserts 420, 425 to provide process gases to either themixing inlet substrate 410 or to the mixing outlet substrate 415 viainserts 435B and 435C.

[0089]FIGS. 21 and 22 illustrate a number of manifold portions 220, 225,230, 235, 240, 255, and 265 that may be used to form a gas panelaccording to an embodiment of the present invention. The manifoldportions 220, 225, 230, 235, 240, 255, and 265 are similar to thosedescribed above with respect to FIG. 9, in that each includes a manifoldbody that is formed from an elongated block of stainless steel or othersuitable material, and each includes at least one port formed in a topsurface of the manifold body. Further, each of the manifold portionsincludes at least one port formed in a surface that is transverse to thetop surface to connect with another manifold portion. As the manifoldportions 220, 225, 230, 235, 240, 255, and 265 are substantially similarto those described above with respect to FIG. 9, only the differencesare described in detail below.

[0090] As illustrated in FIGS. 21 and 22, each of the manifold portions220, 225, 230, 235, 240, 255, and 265 includes at least one, andpreferably, a pair of recesses 295 formed in a transverse side surfaceof the manifold portion and spaced apart from one another. Each of therecesses is outwardly arcuate in shape and forms less than one half acircle (i.e., spans less than 180 degrees). Preferably, for each portformed in the top surface of the manifold body, a pair of recesses 295is formed on each side surface of the manifold body, with each recess ofthe pair being spaced equally from the port. Where the manifold body issymmetric (e.g., manifold portions 220, 240, etc.), it should beappreciated that fewer pairs of recesses may be provided, for example,one pair of recesses disposed on each opposing side surface of themanifold body. Each recess 295 terminates in an edge 296. As shown mostclearly in FIGS. 18 and 20, each of the recesses is constructed toreceive a fastener 205 that rigidly locks the manifold portion withinthe channel 269, 279 of a substrate 260, 270. The edge 296 of the recess295 serves as a stop for the bottom edge of the head of the fastener 205(similar in construction to fastener 315 shown in FIG. 26), and when thefastener 205 is inserted, the bottom edge of the head of the fastener205 forces the manifold tight against the bottom of the channel 269, 279of the substrate 260, 270. The top-most portion of the fastener 205 andthe depth of the recess 295 are dimensioned so that the top-most portionof the fastener 205 does not protrude above the top surface of thesubstrate 260, 270 and interfere with the seal. In general, a pair offasteners 205 located on opposite side surfaces of the manifold portionand on opposing sides of the port is sufficient to force the manifoldportion tightly within the channel 269, 279 of the substrate 260, 270.As noted above, each of the substrates 260, 270 include a complementarymounting recess 290, such that when the manifold portion is aligned inthe base of the channel 269, 279, the recesses 290 and 295 form agenerally circular hole.

[0091] As should be appreciated by those skilled in the art, the use offasteners 205 thus described serves to prevent the possibility ofleakage among the ports of the substrate, the port of the manifoldportion, and the fluid processing devices attached thereto from above.Specifically, by forcing the manifold portion solidly against the bottomof the channel 269, 279 in the substrate 260, 270, the manifold portionserves to define the alignment with the individual substrates 260, 270.Were the manifold portion not firmly secured in the channel 269, 279 ofthe substrate 260, 270, then it would be possible for a severe shock orvibration to further compress the gasket (frequently a deformable metalseal that is typically placed between the fluid processing device andthe ports of the substrate and manifold portion) via vertical movementof the manifold portion within the channel (the manifold portionpotentially being of less thickness than the channel depth), which inturn, could become a leak once that shock or vibrational force wasremoved.

[0092] Another difference between the manifold portions 220, 225, 230,235, 240, 255, and 265 and those described above with respect to FIG. 9is the presence of alignment holes 282 is the lower surface of themanifold portion. As can be seen most clearly in FIG. 22, each manifoldportion may include one or more alignment holes 282 that are constructedto mate with complementary alignment pins 281 formed in a base of thechannel 269, 279 of a substrate 260, 270. The alignment pins 281 may bemade from dowel pins that can be press-fit into appropriate aperturesthat are drilled into the base of the channel 269, 279. By the use ofthe dowel pins in a press-fit arrangement, machining cost can besubstantially reduced and the dowel pins can be purchased with accuratedimensions.

[0093] Preferably, each manifold portion includes two alignment holes282 centrally disposed in the bottom surface of the manifold portion oneither side of each port formed in the top surface of the manifoldportion. In the illustrated embodiments, these alignment holes 282 aregenerally aligned with the recesses 295 in the side surfaces of themanifold portion. It should be appreciated that rather than havingalignment holes 282 formed in the bottom surface of the manifoldportions, alignment pins 281 could be provided instead, with thealignment holes 282 being provided in the base of the channel 269, 279of the substrate 260, 270. It should also be appreciated thatirrespective of where the alignment pins 281 and alignment holes 282 areformed, the alignment pins 281 should be shorter in length than thealignment holes, so that the bottom surface of the manifold portion isin registration with the base of the channel.

[0094] Although a number of different manifold portions 220, 225, 230,235, 240, 255, and 265 have been described herein, it should beappreciated that the present invention is not limited to the illustratedembodiments. For example, manifold portions having a different number ofports formed on a top surface of the manifold body may be used, withonly a single port in a transverse surface of the manifold body, or withtwo ports formed in opposing transverse surfaces of the manifold body.It should further be appreciated that although the ports formed in thetop surface of the manifold portions are illustrated as including acounter-bore that is adapted to receive an annular C-type seal,different port configurations may alternatively be used, such thatstandard fluid processing components may be used therewith. Moreover, itis not required that all ports formed in the top surface of the manifoldhave the same type of seal configuration, as one type of seal may beused in one port, while another type of seal may be used in anotherport.

[0095] As shown in FIGS. 23 and 24, at least one of the ports in the topsurface of the substrates 260, 270, 405, 410, 420, 425, 430 may includea leak port 95 that is formed in the top surface of the substrate.Typically, a leak port 95 is provided between each pair of ports towhich a fluid component is to be fluidly connected. Moreover, althougheach of the substrates 260, 270 is depicted as having a single channel269, 279 formed therein, multiple channels may alternatively beprovided, such that various fluids may be introduced to each of the gassticks A-L, or alternatively to one or more of the gas sticks. Moreover,it should be appreciated that although a specific configuration using atwo port valve, a three port valve, and a mass flow controller in eachof the gas sticks A-L has been described, the present invention is notso limited. Thus, in accordance with the teachings of the presentinvention, more than two component stations may be provided on a singlesubstrate. For example, the substrates 260, 270 may include one or moreadditional component stations adapted to receive a filter, a pressuretransducer or a pressure regulator, or a variety of other fluidprocessing components that are conventionally provided. Moreover, it isnot required that the fluid components mounted to each of the substratesbe the same in each gas stick, as a myriad of different combinations ofcomponents may be readily envisioned.

[0096] According to another aspect of the present invention, rather thanmounting substrates directly to a base, the embodiment of FIGS. 14-28utilizes a floating mount to resiliently mount substrates and othercomponents to the mounting plate, which may then be attached to a base.The floating mount permits limited movement in three orthogonaldirections, such that substrates, manifold portions, and other portionsof the fluid distribution system may be easily interconnected withoutrequiring extreme precision in the placement of holes in the mountingplate. The floating mount also thermally decouples components from themounting plate and base, thereby permitting the components to beeffectively heated or cooled with conventional techniques. Further, thefloating mount also renders the fluid distribution system less sensitiveto shock and vibration, yet provides significant pull and shearstrength. This aspect of the present invention is now describedprimarily with respect to FIGS. 14, 18, 20, 23, 24, 25, 26, 27, and 28.

[0097] As shown in FIGS. 23 and 24, each of the various substrates 260,270, 405, 410, 415, and 430 may include a plurality of mountingapertures or holes 263 that may be used to resiliently mount thesubstrate to the mounting plate 210. Each of these mounting apertures263 receives a threaded fastener 315, such as an Allen bolt. Each of themounting apertures 263 has a recessed edge 316 constructed to receivethe bottom or lower edge of the head of the fastener 315 and urge thesubstrate toward the mounting plate 210 (FIG. 26) as the fastener isengaged in the floating mount 300. The depth of the edge 316 is suchthat when the fastener 315 is engaged with the floating mount 300, thetop-most portion of the fastener is below the top surface of thesubstrate, as shown in FIG. 26. The edges of the mounting plate are bentsuch that region of the mounting plate in which the fluid distributioncomponents are mounted is elevated from the base to which the plate isattached, as shown in FIG. 25.

[0098] The threaded fastener 315 is received in a floating mount 300,which is best illustrated in FIGS. 26 and 27. As shown, the floatingmount 300 includes an upper pressure ring 351, a lower pressure ring354, upper and lower resilient members 352, 353, and a threaded fastener355. The upper pressure ring 351 is generally circular in shape and hasa generally cylindrical shank 356 with flats on opposing sides of theshank. The flats on either side of the shank 356 engage the walls of themounting plate 210 in which a complementary hole 299 (FIG. 28) isformed. An internally threaded through hole 358 that extends through thecenter of the upper pressure ring 351 and the shank 356 receives thethreaded portion of the fastener 315. The upper pressure ring 351 alsoincludes an annular groove 361 formed in an underside thereof thatreceives a toroidal upper resilient member 352. The toroidal upperresilient member 352 is generally formed from an elastomeric material,such as rubber, Viton, Neoprene, or Buna-N, for example, and may be aconventional o-ring.

[0099] The lower pressure ring 354 is also generally circular in shapeand includes an annular groove 357 in a top surface thereof thatreceives a toroidal lower resilient member 353. The lower pressure ring354 also includes a through hole 362 through which the externallythreaded end of the threaded fastener 355 may pass, and includes anaxial clearance hole 360 which permits the shank 356 of the upperpressure ring 351 to be received within the lower pressure ring 354. Theupper and lower pressure rings 351, 354 may be machined from bar stock,or alternatively, powdered metal methods of forming the pressure ringsmay be used.

[0100] In use, the upper resilient member 352 is oriented in the annulargroove 361 of the upper pressure ring 351 between the upper pressurering 351 and the mounting plate 210 and the lower resilient member 353is oriented in the annular groove 357 of the lower pressure ring 354between the lower pressure ring and the mounting plate 210. Theexternally threaded fastener 355 is received in the internally threadedshank 356 of the upper pressure ring 351 and tightened to draw the upperand lower pressure rings together. Because the flats on opposing sidesof the shank 356 engage the flat sidewalls of the hole 299 in themounting plate 210, rotation of the floating mount 300 is preventedduring tightening of the threaded fastener 355. A substrate or othercomponent is placed above the upper pressure ring 351, and the threadedfastener 315 is tightened from above. Again, the flats in the shank 356prevent rotation of the floating mount during tightening of the threadedfastener 315. The shank 356 of the upper pressure ring 351 and thethreaded fasteners 315, 355 are dimensioned so that when fullytightened, the ends of the threaded fasteners 315 and 355 do not contactone another.

[0101] As may be appreciated by those skilled in the art, the floatingmount 300 provides a number of advantages over mounting techniques thatmount fluid components and other structures directly to a base. Forexample, the upper and lower resilient members 352, 353 operate toabsorb shock and vibration, and permit a slight degree of movement ineach of three orthogonal directions (i.e., left, right, and verticallyin the plane of FIG. 14). Thus, the mounting holes 299 in the mountingplate may be formed with less accuracy than would be required if thecomponents and other structures were mounted directly to the mountingplate. Nonetheless, because component substrates are attached to thefloating mount 300 using threaded fasteners, and the floating mount isformed with threaded connections, the mounting possesses substantialpull and shear strength.

[0102] The upper and lower resilient members 352, 353 also function tothermally isolate the components from the mounting plate 210. Thus, eachof the component substrates 260, 270, 405, 410, 415, and 430 may includeholes 500 (see FIGS. 23 and 24) to receive either a heating element or acooling element as desired for the particular application. Because thecomponent substrates are thermally isolated from the mounting panel andthe base, heating or cooling applied to the substrates is not readilyconducted to the plate and the base, which acts as a large heat sink.

[0103] Although the floating mount has been described as being used withcomponent substrates 260, 270, 405, 410, 415, and 430, it may also beused with other structures that are attached to the mounting plate. Forexample, FIGS. 14 and 20 illustrate a support 310 that is used tosupport a conduit providing a process gas and resiliently mount theconduit to the mounting plate 210. A threaded fastener 305 (FIG. 26) maybe inserted into the floating mount 300 through a hole in the base ofthe support 310. In general, any component or structure that might beattached to a base of a fluid distribution system using a threadedfastener may be used with the floating mount 300 where axial compliance,vibration damping, or thermal isolation are desired.

[0104] Having thus described several aspects of at least one embodimentof this invention, it is to be appreciated various alterations,modifications, and improvements will readily occur to those skilled inthe art. For example, although the input ports 71, 271, and 406 insubstrates 70, 270, and 405 are illustrated as being disposed in a fronttransverse surface of the substrate (see FIGS. 10, 11, and 23), they mayalternatively be disposed in either the left or right side transversesurfaces to form a right-angled connection to a source of process fluid,rather than a straight connection. Such alterations, modifications, andimprovements are intended to be part of this disclosure, and areintended to be within the spirit and scope of the invention.Accordingly, the foregoing description and drawings are by way ofexample only.

What is claimed is:
 1. A system for enabling a distribution of fluids,comprising: a substrate having a substrate body that includes a firstsubstrate port and a second substrate port formed in a first surface anda first fluid passageway that extends in a first direction and fluidlyconnects the first substrate port to the second substrate port; and amanifold having a manifold body that includes a first manifold portformed in a first surface, a second manifold port formed in a secondsurface that is transverse to the first surface, and a fluid passagewaythat fluidly connects the first manifold port to the second manifoldport; wherein the substrate further includes a channel formed in thefirst surface of the substrate body that extends in a second direction,the channel being adapted to position the manifold so that the firstsurface of the substrate body and the first surface of the manifold bodyare aligned in a common plane.
 2. The system of claim 1, wherein thefirst substrate port is adapted to receive a first fluid component andthe second substrate port is adapted to receive a second fluid componentthat is distinct from the first fluid component.
 3. The system of claim2, wherein the first and second substrate ports are disposed on a firstside of the channel, and wherein the substrate body further includes aplurality of mounting apertures formed in the first surface of thesubstrate body, the plurality of mounting apertures including at leastone first mounting aperture disposed on the first side of the channeland at least one second mounting aperture disposed on a second side ofthe channel, the plurality of mounting apertures being arranged to mountthe second fluid component in sealing engagement with the secondsubstrate port and the first manifold port.
 4. The system of claim 1,wherein the first and second substrate ports are disposed on a firstside of the channel, the substrate body further including: a thirdsubstrate port and a fourth substrate port formed in the first surfaceof the substrate body and disposed on a second side of the channel; anda second fluid passageway extending in the first direction that fluidlyconnects the third substrate port to the fourth substrate port.
 5. Thesystem of claim 4, wherein the substrate body further includes aplurality of mounting apertures formed in the first surface of thesubstrate body, the plurality of mounting apertures including at leastone first mounting aperture disposed on the first side of the channeland at least one second mounting aperture disposed on the second side ofthe channel, the plurality of mounting apertures being arranged to mounta fluid component in sealing engagement with the second and thirdsubstrate ports and the first manifold port.
 6. The system of claim 5,wherein the plurality of mounting apertures includes no more than fourmounting apertures, the four mounting apertures including two mountingapertures disposed on the first side of the channel and two mountingapertures disposed on the second side of the channel.
 7. The system ofclaim 5, wherein at least one of the channel and the manifold bodyincludes means for aligning the first manifold port with the second andthird substrate ports.
 8. The system of claim 4, wherein the firstsubstrate port is adapted to receive a first fluid component and thesecond substrate port is adapted to receive a second fluid componentthat is distinct from the first fluid component.
 9. The system of claim8, wherein the third substrate port is adapted to receive the secondfluid component and the fourth substrate port is adapted to receive athird fluid component that is distinct from the first and second fluidcomponents.
 10. The system of claim 9, wherein the substrate bodyfurther includes a plurality of mounting apertures formed in the firstsurface of the substrate body, the plurality of mounting aperturesincluding at least one first mounting aperture disposed on the firstside of the channel and at least one second mounting aperture disposedon the second side of the channel, the plurality of mounting aperturesbeing arranged to mount the second fluid component in sealing engagementwith the second and third substrate ports and the first manifold port.11. The system of claim 10, wherein the plurality of mounting aperturesincludes no more than four mounting apertures, the four mountingapertures including two mounting apertures disposed on the first side ofthe channel and two mounting apertures disposed on the second side ofthe channel.
 12. The system of claim 10, wherein the substrate bodyfurther includes: a fifth substrate port formed in the first surface ofthe substrate body and disposed on the first side of the channel; asixth substrate port disposed on the first side of the channel andformed in a second surface of the substrate body that is transverse tothe first surface; and a third fluid passageway extending in the firstdirection that fluidly connects the fifth substrate port to the sixthsubstrate port.
 13. The system of claim 12, wherein the first fluidcomponent comprises a two port valve that is in fluidly connected to thefirst and fifth substrate ports.
 14. The system of claim 13, wherein thesecond fluid component comprises a three port valve that is fluidlyconnected to the second and third substrate ports and the first manifoldport.
 15. The system of claim 14, wherein the second direction isperpendicular to the first direction.
 16. The system of claim 1, whereinthe channel includes a pair of sidewalls and a base, and wherein thebase of the channel includes an aperture through which a rigid membercan be inserted to remove the manifold from the channel.
 17. The systemof claim 16, wherein the aperture is threaded and is adapted to receivea threaded rigid member to remove the manifold from the channel.
 18. Thesystem of claim 1, wherein the substrate is a first substrate, thesystem further comprising: a second substrate having a second substratebody that includes a first substrate port and a second substrate portformed in a first surface of the second substrate body and a first fluidpassageway that extends in the first direction and fluidly connects thefirst and second substrate ports of the second substrate; wherein thesecond substrate further includes a channel formed in the first surfaceof the second substrate body that extends in the second direction and isadapted to position the manifold so that the first surface of the secondsubstrate body and the first surface of the manifold body are aligned inthe common plane.
 19. The system of claim 18, wherein the manifoldincludes a third manifold port formed in the first surface of themanifold body that is fluidly connected to the fluid passageway of themanifold.
 20. The system of claim 19, wherein the channel in the firstsubstrate is aligned, along the second direction, with the channel inthe second substrate.
 21. The system of claim 20, wherein: the first andsecond substrate ports of the first substrate are disposed on a firstside of the channel in the first substrate; the first substrate bodyfurther includes a plurality of mounting apertures formed in the firstsurface of the first substrate body, the plurality of mounting aperturesincluding at least one first mounting aperture disposed on the firstside of the channel in the first substrate and at least one secondmounting aperture disposed on a second side of the channel in the firstsubstrate, the plurality of mounting apertures being arranged to mount afirst fluid component in sealing engagement with the second substrateport of the first substrate and the first manifold port; the first andsecond substrate ports of the second substrate are disposed on a firstside of the channel in the second substrate; and the second substratebody further includes a plurality of mounting apertures formed in thefirst surface of the second substrate body, the plurality of mountingapertures including at least one first mounting aperture disposed on thefirst side of the channel in the second substrate and at least onesecond mounting aperture disposed on a second side of the channel in thesecond substrate, the plurality of mounting apertures being arranged tomount a second fluid component in sealing engagement with the secondsubstrate port of the second substrate and the third manifold port. 22.The system of claim 1, wherein the substrate is a first substrate andthe manifold is a first manifold, the system further comprising: asecond substrate having a second substrate body that includes a firstsubstrate port and a second substrate port formed in a first surface ofthe second substrate body and a first fluid passageway that extends inthe first direction and fluidly connects the first and second substrateports of the second substrate; a second manifold having a secondmanifold body that includes a first manifold port formed in a firstsurface of the second manifold body, a second manifold port formed in asecond surface of the second manifold body that is transverse to thefirst surface of the second manifold body, and a fluid passageway thatfluidly connects the first and second manifold ports of the secondmanifold; wherein the second substrate further includes a channel formedin the first surface of the second substrate body that extends in thesecond direction and is adapted to position the second manifold so thatthe first surface of the second substrate body and the first surface ofthe second manifold body are aligned in the common plane.
 23. The systemof claim 22, wherein the first fluid passageway of the first substrateis aligned, along the first direction, with the first fluid passagewayof the second substrate.
 24. The system of claim 22, wherein the firstand second substrate ports of the first substrate are disposed on afirst side of the channel in the first substrate, the first substratefurther including: a third substrate port and a fourth substrate portformed in the first surface of the first substrate body and disposed ona second side of the channel; and a second fluid passageway extending inthe first direction that fluidly connects the third substrate port tothe fourth substrate port of the first substrate.
 25. The system ofclaim 24, wherein the second substrate port of the first substrate isadapted to receive a first fluid component and the fourth substrate portof the first substrate is adapted to receive a second fluid componentthat is distinct from the first fluid component.
 26. The system of claim25, wherein the first substrate body further includes a first pluralityof mounting apertures formed in the first surface of the first substratebody, the first plurality of mounting apertures including at least onefirst mounting aperture disposed on the first side of the channel in thefirst substrate and at least one second mounting aperture disposed on asecond side of the channel in the first substrate, the first pluralityof mounting apertures being arranged to mount the first fluid componentin sealing engagement with the second and third substrate ports of thefirst substrate and the first manifold port of the first manifold. 27.The system of claim 26, wherein the first plurality of mountingapertures includes no more than four mounting apertures, the fourmounting apertures including two mounting apertures disposed on thefirst side of the channel and two mounting apertures disposed on thesecond side of the channel.
 28. The system of claim 26, wherein: thefirst substrate body further includes a second plurality of mountingapertures formed in the first surface of the first substrate body anddisposed on the second side of the channel in the first substrate, thesecond plurality of mounting apertures being arranged to mount thesecond fluid component in sealing engagement with the fourth substrateport of the first substrate; and the second substrate body furtherincludes a third plurality of mounting apertures formed in the firstsurface of the second substrate body, the third plurality of mountingapertures being arranged to mount the second fluid component in sealingengagement with the first substrate port of the second substrate. 29.The system of claim 28, wherein the first fluid component comprises athree port valve, and wherein the second fluid component comprises amass flow controller.
 30. The system of claim 22, further comprising: athird substrate having a third substrate body that includes a firstsubstrate port and a second substrate port formed in a first surface ofthe third substrate body and a first fluid passageway that extends inthe first direction and fluidly connects the first and second substrateports of the third substrate; wherein the third substrate furtherincludes a channel formed in the first surface of the third substratebody that extends in the second direction and is adapted to position thefirst manifold so that the first surface of the third substrate body andthe first surface of the first manifold body are aligned in the commonplane.
 31. The system of claim 30, further comprising: a fourthsubstrate having a fourth substrate body that includes a first substrateport and a second substrate port formed in a first surface of the fourthsubstrate body and a first fluid passageway that extends in the firstdirection and fluidly connects the first and second substrate ports ofthe fourth substrate; wherein the fourth substrate further includes achannel formed in the first surface of the fourth substrate body thatextends in the second direction and is adapted to position the secondmanifold so that the first surface of the fourth substrate body and thefirst surface of the second manifold body are aligned in the commonplane.
 32. The system of claim 31, wherein the second direction isperpendicular to the first direction.
 33. The system of claim 1, whereinthe second direction is perpendicular to the first direction.
 34. Thesystem of claim 1, wherein at least one of the channel and the manifoldbody includes means for aligning the first manifold port with the secondsubstrate port.
 35. The system of claim 1, wherein the channel includesa pair of sidewalls and a base, wherein at least one sidewall of thepair of sidewalls includes at least one first groove, and wherein themanifold includes at least one second groove, the system furthercomprising: at least one pin to align the first and second grooves sothat the first manifold port is aligned with the second substrate port.36. The system of claim 35, wherein the at least one pin has a lengththat when inserted into the first and second grooves, does not extendabove the common plane.
 37. The system of claim 1, wherein at least oneof the first and second substrate ports includes means for detectingwhether a leak free seal is achieved.
 38. The system of claim 1, whereinthe channel includes a pair of sidewalls and a base, wherein at leastone sidewall of the pair of sidewalls includes at least one first recessextending into the base and having a first edge, and wherein themanifold includes at least one second recess terminating in a secondedge that is complementary to the at least one first recess, the systemfurther comprising: at least one fastener to engage the first and secondedges.
 39. The system of claim 38, wherein the fastener does not extendabove the common plane when engaged with the first and second edges. 40.The system of claim 1, wherein one of the manifold body and the channelincludes a pair of alignment apertures having a shape, and the other ofthe manifold body and the channel includes a pair of alignment postshaving a shape that is complementary to the pair of alignment apertures,a depth of the respective apertures being greater than a height of therespective alignment posts.
 41. The system of claim 40, wherein the pairof alignment apertures and the pair of alignment posts are constructedand arranged such that when mated, the first manifold port is aligned inthe first direction with the second substrate port.
 42. A substrate,comprising: a substrate body; a first port and a second port formed in afirst surface of the substrate body; a first fluid passageway formed inthe substrate body and extending in a first direction that fluidlyconnects the first port to the second port; a channel, formed in thefirst surface of the substrate body, that extends in a second directionthat is different than the first direction, the channel being adapted toposition a manifold having a manifold body that includes a first portformed in a first surface of the manifold body, a second port formed ina second surface of the manifold body, and a fluid passageway thatfluidly connects to the first port of the manifold to the second port ofthe manifold so that the first surface of the substrate body and thefirst surface of the manifold body are aligned in a common plane. 43.The substrate of claim 42, wherein the first and second ports of thesubstrate are disposed on a first side of the channel.
 44. The substrateof claim 43, wherein the substrate body includes a plurality ofapertures formed in the first surface of the substrate body, theplurality of apertures including at least one first aperture disposed onthe first side of the channel and at least one second aperture disposedon a second side of the channel, the at least one first and secondapertures being arranged to mount a fluid component in sealingengagement with the second port of the substrate and the first port ofthe manifold.
 45. The substrate of claim 44, wherein the at least onefirst and second apertures are arranged to mount a two port valve insealing engagement with the second port of the substrate and the firstport of the manifold.
 46. The substrate of claim 43, wherein thesubstrate further comprises: a third port and a fourth port formed inthe first surface of the substrate body and disposed on a second side ofthe channel; and a second fluid passageway formed in the substrate bodyand extending in the first direction that fluidly connects the thirdport to the fourth port.
 47. The substrate of claim 46, wherein thesubstrate body includes a first plurality of apertures formed in thefirst surface of the substrate body, the first plurality of aperturesincluding at least one first aperture disposed on the first side of thechannel and at least one second aperture disposed on a second side ofthe channel, the first plurality of apertures being arranged to mount afluid component in sealing engagement with the second and third ports ofthe substrate and the first port of the manifold.
 48. The substrate ofclaim 47, wherein the first plurality of apertures is arranged to mounta three port valve in sealing engagement with the second and third portsof the substrate and the first port of the manifold.
 49. The substrateof claim 47, wherein the substrate further includes: a fifth port formedin the first surface of the substrate body and disposed on the firstside of the channel; a sixth port disposed on the first side of thechannel and formed in a second surface of the substrate body that istransverse to the first surface; and a third fluid passageway extendingin the first direction that fluidly connects the fifth port to the sixthport.
 50. The substrate of claim 49, wherein the fluid component is afirst fluid component, and wherein the substrate body further includes asecond plurality of apertures formed in the first surface of thesubstrate and disposed about the first and fifth ports, the secondplurality of apertures being arranged to mount a second fluid componentin sealing engagement with the first and fifth ports of the substrate.51. The substrate of claim 50, wherein: the first plurality of aperturesis arranged to mount a three port valve in sealing engagement with thesecond and third ports of the substrate and the first port of themanifold; and the second plurality of apertures is arranged to mount atwo port valve in sealing engagement with the first and fifth ports ofthe substrate.
 52. The substrate of claim 50, wherein the substrate bodyfurther includes a third plurality of apertures formed in the firstsurface of the substrate body and disposed about the fourth port, thethird plurality of apertures being arranged to mount a third fluidcomponent to the fourth port.
 53. The substrate of claim 52, wherein:the first plurality of apertures is arranged to mount a three port valvein sealing engagement with the second and third ports of the substrateand the first port of the manifold; the second plurality of apertures isarranged to mount a two port valve in sealing engagement with the firstand fifth ports of the substrate; and the third plurality of aperturesis arranged to mount one of an inlet side and an outlet side of a massflow controller to the fourth port.
 54. The substrate of claim 42,wherein the channel includes means for aligning the first port of themanifold with the second and third ports of the substrate.
 55. Thesubstrate of claim 42, wherein the second direction is perpendicular tothe first direction.
 56. The substrate of claim 42, wherein the channelincludes a pair of sidewalls and a base, and wherein the base of thechannel includes an aperture through which a rigid member can beinserted to remove the manifold from the channel.
 57. The substrate ofclaim 56, wherein the aperture is threaded and is adapted to receive athreaded rigid member to remove the manifold from the channel.
 58. Thesubstrate of claim 42, wherein the manifold body includes at least onefirst recess formed in the first surface of the manifold bodyterminating in an edge, wherein the channel includes a pair of sidewallsand a base, and wherein at least one sidewall of the pair of sidewallsincludes at least one first recess extending into the base and having afirst edge that is complementary to the at least one first recess. 59.The substrate of claim 42, wherein the channel has a base that includesat least one of an alignment post and an alignment aperture.
 60. A gaspanel, comprising: a first gas stick having a first flow path includinga first plurality of ports formed in a common plane; a second gas stickhaving a second flow path including a second plurality of ports formedin the common plane; and a first manifold having first and second portsformed in the common plane, the first port being fluidly connected toone port of the first plurality of ports of the first gas stick, and thesecond port being fluidly connected to one port of the second pluralityof ports of the second gas stick.
 61. The gas panel of claim 60, furthercomprising: a second manifold having first and second ports formed inthe common plane, the first port of the second manifold being fluidlyconnected to two ports of the first plurality of ports of the first gasstick that are distinct from the one port of the first gas stick, andthe second port of the second manifold being fluidly connected to twoports of the second plurality of ports of the second gas stick that aredistinct from the one port of the second gas stick.
 62. The gas panel ofclaim 61, wherein the second manifold is adapted to receive a purge gasthat can be selectively provided to either the first flow path or thesecond flow path.
 63. The gas panel of claim 60, wherein the first andsecond gas sticks each includes a first substrate having a channel inwhich the first manifold is received, the channel being adapted toposition the first and second ports of the first manifold in the commonplane with the one port of the first and second gas sticks,respectively.
 64. The gas panel of claim 63, wherein the first andsecond gas sticks each includes a second substrate having a channel inwhich the first manifold is received, the channel being adapted toposition the first and second ports of the second manifold in the commonplane with the two ports of the first and second gas sticks,respectively.
 65. A manifold adapted to be received in a substratehaving a substrate body that includes first and second substrate portsformed in a first surface of the substrate body, a first substrate fluidpassageway extending in a first direction that fluidly connects thefirst and second substrate ports, and a channel formed in the firstsurface of the substrate body that extends in a second direction, themanifold comprising: a manifold body; at least one first manifold portformed in a first surface of the manifold body; a second manifold portformed in a second surface of the manifold body that is transverse tothe first surface of the manifold body; and a manifold fluid passagewayformed in the manifold body and extending in the second direction thatfluidly connects the at least one first manifold port to the secondmanifold port; wherein the manifold body is dimensioned to be positionedwithin the channel so that the first surface of the substrate body andthe first surface of the manifold body are aligned in a common plane.66. The manifold of claim 65, wherein the at least one first manifoldport includes a plurality of first manifold ports formed in the firstsurface of the manifold body, each of the plurality of first manifoldports being fluidly connected to the manifold fluid passageway.
 67. Themanifold of claim 66, further comprising: a third manifold port formedin a third surface of the manifold body that is transverse to the firstsurface of the manifold body and parallel to the second surface of themanifold body, the third manifold port being fluidly connected to themanifold fluid passageway.
 68. The manifold of claim 67, wherein themanifold is a first manifold, wherein the second manifold port of thefirst manifold is adapted to mate with a manifold port of a secondmanifold, and wherein the third manifold port of the first manifold isadapted to mate with a manifold port of a third manifold, the firstsecond and third manifolds forming a common manifold.
 69. The manifoldof claim 68, wherein at least one side surface of the manifold body thatis transverse to the first, second, and third surfaces of the manifoldbody includes means for aligning each of the plurality of first manifoldports with a respective port of a respective substrate.
 70. The manifoldof claim 65, further comprising: a third manifold port formed in a thirdsurface of the manifold body that is transverse to the first surface ofthe manifold body and parallel to the second surface of the manifoldbody, the third manifold port being fluidly connected to the manifoldfluid passageway.
 71. The manifold of claim 65, wherein the manifold isa first manifold, and wherein the second manifold port of the firstmanifold is adapted to mate with a manifold port of a second manifold toform and common manifold.
 72. The manifold of claim 65, wherein thesecond manifold port is adapted to mate with a flange that is fluidlyconnected to process fluid supply.
 73. The manifold of claim 65, whereinat least one side surface of the manifold body that is transverse to thefirst and second surfaces of the manifold body includes means foraligning the at least one first manifold port with one of the first andsecond substrate ports.
 74. The manifold of claim 65, wherein at leastone side surface of the manifold body that is transverse to the firstand second surfaces of the manifold body includes at least one groovethat is adapted to receive a pin to align the at least one firstmanifold port with one of the first and second substrate ports.
 75. Themanifold of claim 65, further comprising at least one of an alignmentaperture and an alignment post formed in a third surface of the manifoldbody that is parallel to the first surface and transverse to the secondsurface.
 76. The manifold of claim 65, further comprising at least onerecess that terminates in an edge formed in the first surface of themanifold body.
 77. A mounting assembly, comprising: a first memberhaving a body, the body of the first member including a first surfacefacing a first direction and a second surface facing a second directionopposite to the first direction on opposing surfaces of the body of thefirst member, the second surface having an outer portion that includes agroove disposed adjacent a perimeter of the outer portion and a centralportion that extends from the outer portion in the second direction; asecond member having a body, the body of the second member including afirst surface facing the first direction and a second surface facing thesecond direction opposite to the first direction on opposing surfaces ofthe body of the second member, the second surface having a centralportion and an outer portion that extends from the central portion andincludes a groove disposed adjacent a perimeter of the outer portion,the body of the second member further including a through hole thatextends through the body from the first surface though the centralportion of the second surface; and a first fastener having a threadedshank that is dimensioned to be received within the through hole in thebody of the second member and engage the central portion of the secondsurface of the body first member.
 78. The mounting assembly of claim 77,further comprising: a first resilient member dimensioned to fit at leastpartially within the groove in the outer portion of the second surfaceof the body of the first member; and a second resilient memberdimensioned to fit at least partially within the groove in the outerportion of the second surface of the body of the second member.
 79. Themounting assembly of claim 78, wherein the body of the first memberfurther includes an internally threaded hole in the central portion ofthe second surface, and wherein the threaded shank of the first fasteneris externally threaded and dimensioned to be received within theinternally threaded through hole in the central portion of the secondsurface of the body of the first member.
 80. The mounting assembly ofclaim 79, wherein the first and second members are generally circular inshape.
 81. The mounting assembly of claim 80, wherein the centralportion of the second surface of the body of the first member isgenerally cylindrical in shape with a pair of opposing flat sides. 82.The mounting assembly of claim 81, wherein the internally threaded holein the central portion of the second surface of the body of the firstmember extends through the body of the first member from the firstsurface through the central portion of the second surface of the body ofthe first member.
 83. The mounting assembly of claim 78, wherein thefirst and second resilient members are formed from an elastomericmaterial.
 84. A method of attaching a substrate to a mounting platehaving a hole that extends through the mounting plate from a firstsurface of the mounting plate to a second surface of the mounting plate,comprising acts of: positioning an upper mount subassembly on the firstsurface adjacent the hole and passing a central portion of the uppersubassembly through the hole; positioning a lower mount subassembly onthe second surface adjacent the hole so that the central portion of theupper mount subassembly is disposed within a central portion of thelower mount subassembly; fastening the lower mount subassembly to theupper mount subassembly; and fastening the substrate to the upper mountsubassembly.
 85. The method of claim 84, wherein the upper mountsubassembly comprises a first rigid member and a first resilient member,the first rigid member having a body that includes first and secondsurfaces disposed on opposite sides of the body, the second surfacehaving an outer portion that includes a groove disposed adjacent aperimeter of the outer portion and a central portion, forming thecentral portion of the upper mount subassembly, that extends from theouter portion, wherein the act of positioning the upper mount assemblyincludes an act of positioning the upper mount assembly so that thefirst resilient member fits at least partially within the groove betweenthe first rigid member and the first surface of the mounting plate. 86.The method of claim 85, wherein the lower mount assembly comprises asecond rigid member and a second resilient member, the second rigidmember having a body that includes first and second surfaces disposed onopposite sides of the body, the second surface having a central portionforming the central portion of the lower mount assembly and an outerportion that extends from the central portion and includes a groovedisposed adjacent a perimeter of the outer portion; and wherein the actof positioning the lower mount assembly includes an act of positioningthe lower mount assembly so that the second resilient member fits atleast partially within the groove between the second rigid member andthe second surface of the mounting plate.
 87. The method of claim 86,wherein the central portion of the second surface of the first rigidmember includes an internally threaded hole; wherein the body of thesecond rigid member includes a through hole that extends through thebody of the second rigid member from the first surface through thecentral portion of the second surface; and wherein the act of fasteningthe lower mount subassembly to the upper mount subassembly includes actsof passing an externally threaded shank of a first fastener through thethrough hole in the body of the second rigid member and into theinternally threaded hole in the central portion of the second surface ofthe first rigid member.
 88. The method of claim 87, wherein theinternally threaded hole in the central portion of the second surface ofthe first rigid member extends through the body of the first rigidmember to the first surface; and wherein the act of fastening thesubstrate to the upper mount subassembly includes an act of passing anexternally threaded shank of a second fastener through the substrate andinto the internally threaded hole.